서지주요정보
Hg0.78Cd0.22Te 적외선 감지소자의 제작과 하이브리드 본딩 후 열처리 효과 = Fabrication of Hg0.78Cd0.22Te infrared photodetector and anneling effect after hybrid-bonding
서명 / 저자 Hg0.78Cd0.22Te 적외선 감지소자의 제작과 하이브리드 본딩 후 열처리 효과 = Fabrication of Hg0.78Cd0.22Te infrared photodetector and anneling effect after hybrid-bonding / 배수호.
발행사항 [대전 : 한국과학기술원, 1996].
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소장정보

등록번호

8006251

소장위치/청구기호

학술문화관(문화관) 보존서고

MEE 96036

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초록정보

$Hg_{0.78}Cd_{0.22}Te$ diodes have been fabricated by employing an ion-implantation technique and hybridized with Si which have metal pads and Indium bumps using flip-chip bonder. The performances of the diodes, prior to and after annealing at 120℃ which is performed after hybrid bonding, have been investigated. Prior to the annealing process, dark currents are limited by band-to-band and trap-assisted tunneling current owing to high concentration of $N_D$ and $N_t$ But, after annealing, diode characteristics are improved dramatically, namely, RoA values are incresed and dark currents at reverse bias are reduced. Over 160 diodes are compared prior to and after annealing and all of them show these improvements. These results were compared with computer calculation and the improvements are explained by changes in both carrier concentration profile and pn junction position during the annealing process. Donor concentration $N_D$ was changed from 1×$10^{18}$ to 3×$10^{16}$ and trap density was changed from 9.2×$10^{16}$ to 7.3×$10^{16}$.

서지기타정보

서지기타정보
청구기호 {MEE 96036
형태사항 iii, 47 p. : 삽화 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Soo-Ho Bae
지도교수의 한글표기 : 이희철
지도교수의 영문표기 : Hee-Chul Lee
학위논문 학위논문(석사) - 한국과학기술원 : 전기및전자공학과,
서지주기 참고문헌 : p. 46-47
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